JPS628632U - - Google Patents
Info
- Publication number
- JPS628632U JPS628632U JP10031985U JP10031985U JPS628632U JP S628632 U JPS628632 U JP S628632U JP 10031985 U JP10031985 U JP 10031985U JP 10031985 U JP10031985 U JP 10031985U JP S628632 U JPS628632 U JP S628632U
- Authority
- JP
- Japan
- Prior art keywords
- reactant gas
- dome
- heat treatment
- vertical semiconductor
- semiconductor heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims description 12
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000012495 reaction gas Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000006185 dispersion Substances 0.000 claims description 6
- 239000000376 reactant Substances 0.000 claims 7
- 239000000428 dust Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10031985U JPS628632U (en]) | 1985-07-01 | 1985-07-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10031985U JPS628632U (en]) | 1985-07-01 | 1985-07-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS628632U true JPS628632U (en]) | 1987-01-19 |
Family
ID=30970031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10031985U Pending JPS628632U (en]) | 1985-07-01 | 1985-07-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS628632U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58154226A (ja) * | 1982-03-10 | 1983-09-13 | Fuji Xerox Co Ltd | プラズマｃｖｄ装置 |
-
1985
- 1985-07-01 JP JP10031985U patent/JPS628632U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58154226A (ja) * | 1982-03-10 | 1983-09-13 | Fuji Xerox Co Ltd | プラズマｃｖｄ装置 |
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